Suspended gas distribution plate

Details Suspended gas distribution plate Suspended gas distribution plate

2006-03-28

2006-03-28

Lund, Jeffrie R. (Department: 1763)

Metal working

Method of mechanical manufacture

Gas and water specific plumbing component making

C029S428000, C118S7230ER, C118S715000, C156S345340

Reexamination Certificate

active

07017269

ABSTRACT:
A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.

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