Method and device for heat dissipation in semiconductor modules

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With contact or lead

Reexamination Certificate

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C257S701000, C257S702000, C257S703000, C257S705000, C257S706000, C257S707000, C257S708000, C257S709000, C257S712000, C257S713000, C257S717000, C257S720000, C438S122000, C438S502000, C361S688000, C361S701000, C361S702000, C361S703000

Reexamination Certificate

active

07049695

ABSTRACT:
A structure and method are provided for dissipating heat from a semiconductor device chip. A first layer of a dielectric material (e.g. polyimide) is formed on a front side of a heat spreader (typically Si). A plurality of openings are formed through this first layer; the openings are filled with metal (typically Cu), thereby forming metal studs extending through the first layer. A second layer of metal is formed on the backside of the device chip. The first layer and the second layer are then bonded in a bonding process, thereby forming a bonding layer where the metal studs contact the second layer. The bonding layer thus provides a thermal conducting path from the chip to the heat spreader.

REFERENCES:
patent: 6110806 (2000-08-01), Pogge
patent: 6444560 (2002-09-01), Pogge et al.
patent: 6477054 (2002-11-01), Hagerup
patent: 6599778 (2003-07-01), Pogge et al.
patent: 2004/0238946 (2004-12-01), Tachibana et al.
patent: 5-82686 (1993-04-01), None
patent: 5-343556 (1993-12-01), None

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