Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Defined electrolyte movement or pressure
Reexamination Certificate
2005-12-20
2005-12-20
Ryan, Patrick Joseph (Department: 1745)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
Defined electrolyte movement or pressure
C204S22400M, C204S282000
Reexamination Certificate
active
06977036
ABSTRACT:
A method and apparatus are provided for polishing a substrate surface. In one aspect, an apparatus for polishing a substrate includes a conductive polishing pad and an electrode having a membrane disposed therebetween. The membrane is orientated relative the conductive pad in a manner that facilitates removal of entrained gas from electrolyte flowing towards the conductive pad. The apparatus may be part of an electro-chemical polishing station that may optionally be part of a system that includes chemical mechanical polishing stations.
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Birang Manoocher
Butterfield Paul D.
Chen Liang-Yuh
Duboust Alain
Morad Ratson
Moser Patterson & Sheridan
Parsons Thomas H.
Ryan Patrick Joseph
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