Metallurgical apparatus – With control means responsive to sensed condition – With temperature sensor
Reexamination Certificate
2005-11-15
2005-11-15
Kastler, Scott (Department: 1742)
Metallurgical apparatus
With control means responsive to sensed condition
With temperature sensor
C219S497000
Reexamination Certificate
active
06964751
ABSTRACT:
Method and device for the heat treatment of substrates, wherein the substrates are positioned in the vicinity of a heated, essentially flat furnace body extending over the surface of the substrate. In order to provide a reproducible treatment when treating a number of substrates successively, the temperature of the furnace body is measured so close to the surface adjacent to the substrate that the withdrawal of heat from the furnace body by the substrate can be detected. The introduction of each substrate takes place at a point in time when the temperature measured in this way is, within certain limits, equal to a desired initial treatment temperature Ttrig.
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Bast Ronald
Kuznetsov Vladimir Ivanovich
Storm Arjen
Zinger Jan
ASM International N.V.
Kastler Scott
Knobbe Martens & Olson Bear LLP.
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