4. Heating
  5. Heating or heat retaining work chamber structure
  6. Including baffle wall, work shield, or work support element

Ronald Bast

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Apparatus for processing a wafer

Heating – Heating or heat retaining work chamber structure – Including baffle wall – work shield – or work support element
Reexamination Certificate

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Method and device for heat treating substrates

Metallurgical apparatus – With control means responsive to sensed condition – With temperature sensor
Reexamination Certificate

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Method and device for heat treating substrates

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Reexamination Certificate

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