4. Tool driving or impacting
  5. With indicating or signaling means

Vladimir Ivanovich Kuznetsov

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Apparatus for processing a wafer

Heating – Heating or heat retaining work chamber structure – Including baffle wall – work shield – or work support element
Reexamination Certificate

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Apparatus for transferring wafer and ring

Material or article handling – Chamber of a type utilized for a heating function and... – Including driven device and/or inclined flow path to carry...
Reexamination Certificate

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Apparatus for treating a wafer

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus, method and system for the treatment of a wafer

Drying and gas or vapor contact with solids – Process – With nondrying treating of material
Reexamination Certificate

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Apparatus, method and system for the treatment of a wafer

Drying and gas or vapor contact with solids – Process – With nondrying treating of material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-248923

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