Method for fabricating microlens with lithographic process

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article

Reexamination Certificate

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C438S070000

Reexamination Certificate

active

06861207

ABSTRACT:
A method of fabricating microlens devices. The method includes filling the bond pad areas and scribe lines, or other areas, to improve the topography of the semiconductor wafer surface. A microlens material is applied to the surface after the bond pad areas and scribe lines have been filled. Because of the improved topography, the thickness of the microlens material is more uniform, thereby facilitating the formation of uniformly shaped microlenses.

REFERENCES:
patent: 5426058 (1995-06-01), Nakai et al.
patent: 6200712 (2001-03-01), Fan et al.
patent: 6395576 (2002-05-01), Chang et al.
patent: 6511779 (2003-01-01), Weng et al.
patent: 6-302794 (1994-10-01), None
patent: 2001-0010306 (2004-02-01), None
English language translation of KR 2001-0010306, Feb. 2001.*
English abstract of KR 2001-010306, Feb. 5, 2001, Kim, with figure.

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