Electrolyte composition and treatment for electrolytic...

Details Electrolyte composition and treatment for electrolytic... Electrolyte composition and treatment for electrolytic...

2005-05-31

2005-05-31

Ryan, Patrick (Department: 1745)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

With programmed, cyclic, or time responsive control

C205S668000, C205S674000

Reexamination Certificate

active

06899804

ABSTRACT:
An electrolyte composition and method for planarizing a surface of a wafer using the electrolyte composition is provided. In one aspect, the electrolyte composition includes ammonium dihydrogen phosphate, diammonium hydrogen phosphate, or a mixture thereof. The composition has a pH between about 3 and about 10 which is environmentally friendly and does not present hazardous operation concerns. The composition may further comprise one or more additives selected from a group consisting of benzotriazole, ammonium citrate, ethlylenediamine, tetraethylenepentamine, triethylenetetramine, diethylenetriamine, amino acids, ammonium oxalate, ammonia, ammonium succinate, and citric acid.

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