Semiconductor device and method of shunt test measurement...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package

Reexamination Certificate

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C257S690000, C257S693000, C257S723000

Reexamination Certificate

active

07906839

ABSTRACT:
A semiconductor device has an inductor and capacitor formed on the substrate. The inductor and capacitor are electrically connected in series. The inductor is a coiled conductive layer. The capacitor has first and second conductive layers separated by an insulating layer. A first test pad and second test pad are formed on the substrate. A terminal of the inductor is coupled to the first and second test pads. A third test pad and fourth test pad are formed on the substrate. A terminal of the capacitor is coupled to the third and fourth test pads such that the inductor and capacitor are connected in shunt between the first and second test pads and the third and fourth test pads. An electrical characteristic of the inductor and capacitor such that resonant frequency and quality factor are tested using a two-port shunt measurement which negates series resistance of test probes.

REFERENCES:
patent: 6424028 (2002-07-01), Dickinson
patent: 6825818 (2004-11-01), Toncich
patent: 7305223 (2007-12-01), Liu et al.

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