Method and apparatus for controlling a workpiece in a vacuum cha

Details Method and apparatus for controlling a workpiece in a vacuum cha Method and apparatus for controlling a workpiece in a vacuum cha

1999-03-19

2000-12-19

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

25044211, H01J 3700

Patent

active

061630330

ABSTRACT:
An apparatus used to control a workpiece inside a vacuum chamber. The workpiece is supported on a workpiece holder in the vacuum chamber. The workpiece is isolated from the atmosphere outside of the vacuum chamber by differentially pumped vacuum seals and an integral air bearing support. The differentially pumped vacuum seals and integral air bearing support allow for multiple independent motions to be transmitted to the workpiece supported by the workpiece holder. The workpiece holder motions provided are (1) rotation about the X axis, (2) translation back and forth along the Y direction of an X-Y plane on the surface of the workpiece holder, and (3) rotation of the workpiece in the X-Y plane about its Z axis. Concentric seals, oval for the translation motion and circular for the rotational motion, are differentially pumped through common ports to provide successively decreasing pressure and gas flow in order to reduce the gas load into the vacuum vessel to a negligible rate.

REFERENCES:
patent: 3778626 (1973-12-01), Robertson
patent: 4035655 (1977-07-01), Guernet et al.
patent: 4191385 (1980-03-01), Fox et al.
patent: 4228358 (1980-10-01), Ryding
patent: 4229655 (1980-10-01), Ryding
patent: 4234797 (1980-11-01), Ryding
patent: 4258266 (1981-03-01), Robinson et al.
patent: 4261762 (1981-04-01), King
patent: 4274004 (1981-06-01), Kanai
patent: 4276477 (1981-06-01), Enge
patent: 4383178 (1983-05-01), Shibata et al.
patent: 4453080 (1984-06-01), Berkowitz
patent: 4498833 (1985-02-01), Hertel
patent: 4634331 (1987-01-01), Hertel
patent: 4672210 (1987-06-01), Armstrong et al.
patent: 4726689 (1988-02-01), Pollock
patent: 4733091 (1988-03-01), Robinson et al.
patent: 4745287 (1988-05-01), Turner
patent: 4899059 (1990-02-01), Freytsis et al.
patent: 4922106 (1990-05-01), Berrian et al.
patent: 4980562 (1990-12-01), Berrian et al.
patent: 5003183 (1991-03-01), Nogami et al.
patent: 5030835 (1991-07-01), Tamai et al.
patent: 5229615 (1993-07-01), Brune et al.
patent: 5593551 (1997-01-01), Lai
patent: 5594252 (1997-01-01), Day et al.
patent: 5600136 (1997-02-01), Hablanian et al.
patent: 5608216 (1997-03-01), Wells et al.
patent: 5608223 (1997-03-01), Hirokawa et al.
patent: 5624536 (1997-04-01), Wada et al.
patent: 5635036 (1997-06-01), Demaray et al.
patent: 5898179 (1999-04-01), Smick et al.

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