Methods of making flash memory cell arrays having dual...

Details Methods of making flash memory cell arrays having dual... Methods of making flash memory cell arrays having dual...

2011-05-31

2011-05-31

Landau, Matthew C (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257SE21681

Reexamination Certificate

active

07951669

ABSTRACT:
Methods of fabricating a dual control gate non-volatile memory array are described. Parallel strips of floating gate material are formed over the substrate in a first direction but separated from it by a tunnel dielectric. In the gaps between these strips control gate material is formed forming a second set of parallel strips but insulated from both the adjacent floating gate stripes and the substrate. Both sets of strips are isolated in a second direction perpendicular to the first direction forming an array of individual floating gates and control gates. The control gates formed from an individual control gate strip are then interconnected by a conductive wordline such the potential on individual floating gates are controlled by the voltages on two adjacent wordlines. In other variations either the floating gates or the control gates may be recessed into the original substrate.

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Hsu, Chen

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