Data processing: structural design – modeling – simulation – and em – Modeling by mathematical expression
Reexamination Certificate
2011-06-28
2011-06-28
Jones, Hugh (Department: 2128)
Data processing: structural design, modeling, simulation, and em
Modeling by mathematical expression
Reexamination Certificate
active
07970588
ABSTRACT:
A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. The method includes the steps of identifying one or more input parameters that cause a change in output characteristics, defining global nodes using estimated maximum and minimum values of the input parameters, and defining a mathematical equation that calculates a predicted output characteristic for each node. The method also includes the steps of receiving at least one empirical data point having one or more input parameter values and at least one empirical output value and adjusting the predicted output values at the nodes based on a difference between the at least one empirical output value and the predicted output characteristic calculated using the mathematical equation based on the one or more input parameter values.
REFERENCES:
patent: 3767900 (1973-10-01), Chao et al.
patent: 4616308 (1986-10-01), Morshedi et al.
patent: 4663703 (1987-05-01), Axelby et al.
patent: 5347446 (1994-09-01), Iino et al.
patent: 5519605 (1996-05-01), Cawlfield
patent: 6263255 (2001-07-01), Tan et al.
patent: 6278899 (2001-08-01), Piche et al.
patent: 6298470 (2001-10-01), Breiner et al.
patent: 6381564 (2002-04-01), Davis et al.
patent: 7668702 (2010-02-01), Kokotov et al.
Boning et al., Run by Run Control of Chemical-Mechanical Polishing, IEEE Trans. CPMT (C), vol. 19, No. 4, pp. 307-314, Oct. 1996.
Smith, Taber and Boning. “a self-tuning EWMA Controller utilizing artificial neural network function approximation techniques”. IEEE/CMPT Int. Elect. Man. Tech. Symp., pp. 355-363, 1996.
M. Pilu, “Undoing Page Curl Distortion Using Applicable Surfaces”, IEEE International Conference on Image Processing, Thessalonica, Greece, Sep. 2001, pp. 1-5.
MacGregor et al., “Statistical Process Control of Multivariate Processes,” Control Eng. Practice, vol. 3, No. 3, pp. 403-414, 1995.
Office Action for U.S. Appl. No. 10/377,654, mailed Oct. 5, 2009 (P020).
Office Action for U.S. Appl. No. 10/377,654, mailed Apr. 13, 2009 (P020).
Office Action for U.S. Appl. No. 10/377,654, mailed Oct. 28, 2008 (P020).
Office Action for U.S. Appl. No. 10/377,654, mailed Apr. 2, 2008 (P020).
Office Action for U.S. Appl. No. 10/377,654, mailed Nov. 1, 2007(P020).
Office Action for U.S. Appl. No. 10/377,654, mailed Mar. 8, 2007 (P020).
Entin Efim
Fisher Yossi
Hartman Jehuda
Kokotov Yuri
Sarfaty Moshe
Applied Materials Inc.
Blakely , Sokoloff, Taylor & Zafman LLP
Jones Hugh
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