Probe storage container, prober apparatus, probe arranging...

Details Probe storage container, prober apparatus, probe arranging... Probe storage container, prober apparatus, probe arranging...

2011-01-25

2011-01-25

McDonald, Rodney G (Department: 1795)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S298350, C204S298360

Reexamination Certificate

active

07875156

ABSTRACT:
A probe storage container can supply a probe in a prober apparatus without being exposed to an atmospheric air. Preferably, the probe is stored in the probe storage container by removing an oxide film in a leading end portion of the probe in accordance with a dry treatment using an ion source, for example, without being exposed to the atmospheric air. It is thus possible to replace and attach the probe with respect to the prober apparatus without being exposed to the atmospheric air, avoiding formation of an oxide film on a surface of the probe. Further, a worker attaching the probe to the prober apparatus can work without being directly in contact with the probe, and it is possible to prevent the leading end portion of the probe from being broken. Accordingly, it is possible to stably measure an electric characteristic of a semiconductor device or the like on the wafer.

REFERENCES:
patent: 5004977 (1991-04-01), Kazama
patent: 6-66557 (1994-03-01), None
patent: 6-109415 (1994-04-01), None
patent: 9-262079 (1997-10-01), None
patent: 2006-125909 (2006-05-01), None
patent: WO 2006/138593 (2006-12-01), None

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