Etching agent for III/V semiconductors

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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Details

156645, 156662, 156903, 252 793, H01L 21306

Patent

active

041000145

ABSTRACT:
An etching agent for III/V semiconductor material consisting of

REFERENCES:
Compound Semiconductors, vol. 1, Preparation of III-V Compounds, Rheinhold, 963, pp. 445-468, Etching of the III-V Intermetallic Compounds by J. W. Faust, Jr.

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