Scanning probe microscope and micro-area processing machine both

Details Scanning probe microscope and micro-area processing machine both Scanning probe microscope and micro-area processing machine both

1997-02-12

1999-08-31

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, 2504431, H01J 3700

Patent

active

059456710

ABSTRACT:
A scanning probe microscope has a probe for measuring the shape of a sample surface and various physical properties of the sample, and a micro-positioning mechanism for positioning the sample proximate the probe. The micro-positioning mechanism has spring elements for effecting fine movement of the sample in a predetermined direction toward the probe, an electromagnetic power generating mechanism for driving the spring elements, a support mechanism mounted for movement in the predetermined direction and having a support member supported through a viscous element for effecting coarse movement of the sample in the predetermined direction, and a heating mechanism for heating the viscous element.

REFERENCES:
patent: 3678270 (1972-07-01), Braun et al.
patent: 4590380 (1986-05-01), Tamaki
patent: 4947042 (1990-08-01), Nishioka et al.
patent: 5103174 (1992-04-01), Wandass et al.
patent: 5808302 (1998-09-01), Binnig

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