Method and apparatus for independently measuring the thickness a

Details Method and apparatus for independently measuring the thickness a Method and apparatus for independently measuring the thickness a

1995-08-28

1997-07-08

Font, Frank G.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356381, 356357, G01B 902, G01B 1106

Patent

active

056467346

ABSTRACT:
An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes a first coupler for generating a first probe light signal and a second probe light signal from a low coherence light source. The first probe light signal is directed toward the top surface of the film at a first angle of incidence and the light leaving the top surface of the film is collected. Similarly, the second probe light signal is directed toward the top surface of the film at a second angle of incidence different from said first angle of incidence and the light leaving the top surface of the film is also collected. The collected light is combined to form a collected light signal which is input to a receiver that determines the time delay between light reflected from the top and bottom surfaces of the film. In the preferred embodiment of the present invention, the receiver is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the combined light signal.

REFERENCES:
patent: 4453828 (1984-06-01), Hershel et al.
patent: 5323229 (1994-06-01), May et al.

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