Fishing – trapping – and vermin destroying
Patent
1994-12-21
1997-01-21
Picardat, Kevin M.
Fishing, trapping, and vermin destroying
437 21, 437 22, 437 40, H01L 21265
Patent
active
055959440
ABSTRACT:
A process for fabricating a thin film transistor, which comprises crystallizing an amorphous silicon film, forming thereon a gate insulating film and a gate electrode, implanting impurities in a self-aligned manner, adhering a coating containing a catalyst element which accelerates the crystallization of the silicon film, and annealing the resulting structure at a temperature lower than the deformation temperature of the substrate to activate the doped impurities. Otherwise, the catalyst element can be incorporated into the structure by introducing it into the impurity region by means of ion implantation and the like. Also a process for fabricating a thin film transistor, which comprises forming a gate electrode, a gate insulating film, and an amorphous silicon film on a substrate, implanting impurities into the amorphous silicon film to form source and drain regions as the impurity regions, introducing a catalyst element into the impurity region by adhering a coating containing the catalyst element of by means of ion doping and the like, and annealing the resulting structure at a temperature lower than the deformation temperature of the substrate to activate the doped impurities.
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Takayama Toru
Takemura Yasuhiko
Zhang Hongyong
Ferguson Jr. Gerald J.
Picardat Kevin M.
Semiconductor Energy Laboratory Co., Inc.
Smith Evan R.
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