4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Semiconductor Energy Laboratory Co., Inc.

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Active matrix type electro-optical device

Liquid crystal cells – elements and systems – Particular excitation of liquid crystal – Electrical excitation of liquid crystal
Patent

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Apparatus for microwave processing in a magnetic field

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Electro-optical device and thin film transistor and method...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Liquid crystal electro-optical device utilizing a polymer...

Liquid crystal cells – elements and systems – Particular structure – Having significant detail of cell structure only
Reexamination Certificate

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Method of fabricating a thin film semiconductor device using an

Fishing – trapping – and vermin destroying
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