Electron microscope, a camera for such an electron microscope, a

Details Electron microscope, a camera for such an electron microscope, a Electron microscope, a camera for such an electron microscope, a

1993-09-16

1995-10-10

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

2504831, 2504861, G01N 2300

Patent

active

054573173

ABSTRACT:
An electron microscope uses a camera with a plurality of fluorescent elements separated by walls and a corresponding plurality of detector elements which receive light from fluorescent elements. The walls prevent electrons incident on one fluorescent element from affecting an adjacent fluorescent element, thereby reducing blurring of the image produced by the camera. The fluorescent elements may be connected to the detector elements by waveguides having filters which permit the intensity of light transmitted to each detector element to be adjusted to give a uniform response. The fluorescent elements may be arranged in a linear array, and the electron microscope is then operated to cause an image of a sample to scan across the array.

REFERENCES:
patent: 3048698 (1959-03-01), Carlson
patent: 3671742 (1972-06-01), Browning
patent: 3849647 (1974-11-01), Koike et al.
patent: 3868510 (1975-02-01), Murata et al.
patent: 3944817 (1976-03-01), Hilsum et al.
patent: 4399360 (1983-08-01), Fotino
patent: 4694177 (1987-09-01), Akai
patent: 5015057 (1991-05-01), Rumbaugh et al.
patent: 5153926 (1992-10-01), Jansson et al.

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