4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Teiji Katsuta

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Electron beam scribing method

Electric heating – Metal heating – By arc
Patent

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Electron beam testing method and apparatus of mask

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Electron microscope, a camera for such an electron microscope, a

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Profile ID: LFUS-PAI-P-1058186

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