Scanning type electron microscope

Details Scanning type electron microscope Scanning type electron microscope

1978-08-21

1980-09-09

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250451, G01M 2300

Patent

active

042219655

ABSTRACT:
A sample is bidimensionally scanned with an electron beam to display an image of the sample based on a secondary-electron signal generated from the sample. Two marks corresponding to two points on the sample are displayed in superposition to the image and a distance between the two points on the sample is calculated based on coordinates of the marks and a tilting angle of the sample to the electron beam.

REFERENCES:
patent: 4039829 (1977-08-01), Kato et al.

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