Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1999-12-29
2000-12-12
Bowers, Charles
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
H01L 218234
Patent
active
061598062
ABSTRACT:
A method for depositing an oxide layer after spacer formation is disclosed. Owing to an oxide layer after spacer formation, therefore substantially increasing the effective thickness of spacer of the peripheral circuit. The method includes which includes a substrate on which an interior and a peripheral circuit are defined, wherein there is a gate oxide layer formed on the substrate. Sequentially an interior gate and a peripheral gate are formed. Then, N-type ions are implanted into the substrate of the interior and peripheral circuit. Consequently, conformal a second dielectric layer and a third dielectric layer are deposited above the substrate, interior gate, and peripheral gate, wherein second dielectric layer is etched to form a spacer of the interior gate and the peripheral gate. And then N.sup.+ -type ions are implanted into the substrate to form source/drain by using the peripheral gate, the spacer and a portion of the third dielectric layer that runs along the spacer as a mask. Subsequently, a blanket inter-plasma dielectric is deposited above the substrate. Finally, inter-polysilicon dielectric of the interior and peripheral circuit is etched anisotropically to form a plurality of contacts.
REFERENCES:
patent: 5656533 (1997-08-01), Lee
Chern Horng-Nan
Lin Hsi-Chia
Lin Kun-Chi
Bowers Charles
Thompson Craig
United Microelectronics Corp.
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