Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1993-03-05
1994-05-03
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430165, 430189, 430192, 430193, 430270, 430330, 534557, G03F 723, G03F 730
Patent
active
053087445
ABSTRACT:
A new photoacid generator having the formula ##STR1## wherein R=hydrogen, hydroxyl, or the --O--S(.dbd.O).sub.2 --Q moiety;
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Bowers Jr. Charles L.
Chu John S.
Didrick Robert M.
Morton International Inc.
White Gerald K.
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