Semiconductor device and method of manufacture of the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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Details

257397, 257513, H01L 2976

Patent

active

059693932

ABSTRACT:
A semiconductor device comprises a semiconductor substrate having a major surface, a semiconductor region defined between at least two trenches formed in the major surface, a first insulating layer formed on at least side walls of each of the trenches, and a second insulating layer formed in a predetermined area of the surface of the semiconductor region to contact the first insulating layer. The thickness of the first insulating layer at the top of the side walls is set larger than the thickness of the second insulating layer.

REFERENCES:
patent: 5221857 (1993-06-01), Kano
patent: 5650654 (1997-07-01), Noble

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