Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1996-09-11
1999-10-19
Crane, Sara
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257397, 257513, H01L 2976
Patent
active
059693932
ABSTRACT:
A semiconductor device comprises a semiconductor substrate having a major surface, a semiconductor region defined between at least two trenches formed in the major surface, a first insulating layer formed on at least side walls of each of the trenches, and a second insulating layer formed in a predetermined area of the surface of the semiconductor region to contact the first insulating layer. The thickness of the first insulating layer at the top of the side walls is set larger than the thickness of the second insulating layer.
REFERENCES:
patent: 5221857 (1993-06-01), Kano
patent: 5650654 (1997-07-01), Noble
Crane Sara
Kabushiki Kaisha Toshiba
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