Device for measuring the thickness of thin films

Details Device for measuring the thickness of thin films Device for measuring the thickness of thin films

1994-04-01

1996-05-14

Rosenberger, Richard A.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356382, G01B 1106, G01B 1110

Patent

active

055173128

ABSTRACT:
A thin film thickness measuring device is disclosed. The device includes an illuminator, a receiver and a beam deflector. The illuminator provides a collimated input light beam along an input axis. The receiver includes a lens and a diaphragm having a pinhole located at a focal point of the lens and receives a collimated output light beam along an output axis parallel to the input axis. The beam deflector is translatable at least along a scanning axis parallel to the input axis. The beam deflector directs the input light beam towards a sample and the output light beam from the sample towards the receiver.

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