Method for determining the thickness of an optical sample

Details Method for determining the thickness of an optical sample Method for determining the thickness of an optical sample

1997-08-29

1998-07-14

Font, Frank G.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356382, 25055927, 2502013, 2502014, 2502015, G01B 1106, G02B 704

Patent

active

057813035

ABSTRACT:
The present invention relates to the field of quantitative microspectroscopy, and in particular to a method for determining the exact thickness of an optical microscopic sample.
The thickness is determined by using optical marks whose position is determined through an in-focus position measurement of a first and second optical mark. After these two positions measurements are performed, the thickness of a sample is determined through a mathematical calculation using these two values.

REFERENCES:
patent: 5202740 (1993-04-01), Kivits
patent: 5696589 (1997-12-01), Bernacki

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