Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1995-06-07
1998-02-24
Bowers, Jr., Charles L.
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
H01L 21336
Patent
active
057211701
ABSTRACT:
In a high-voltage MOS transistor that utilizes a lightly-doped drain region to isolate a heavily-doped drain region from the substrate, the reverse bias which can be applied across the drain-to-substrate junction of the transistor is increased by reducing the width of the heavily-doped drain region.
REFERENCES:
patent: 4949136 (1990-08-01), Jain
patent: 5061649 (1991-10-01), Takenouchi et al.
patent: 5162884 (1992-11-01), Liou et al.
patent: 5254866 (1993-10-01), Ogoh
patent: 5334870 (1994-08-01), Katada et al.
patent: 5350698 (1994-09-01), Huang et al.
patent: 5476803 (1995-12-01), Liu
patent: 5518944 (1996-05-01), Hiroki et al.
patent: 5518945 (1996-05-01), Bracchitta et al.
patent: 5541131 (1996-07-01), Yoo et al.
A.L. Butler, et al., "Improved Device Performance as a result of Shallow Phosphorous Source-Drains by Rapid Thermal Annealing," Proceedings of the First International Symposium on Ultra Large Scale Integration Science and Technology, ULSI Science and Technology/1987, pp. vii-xi and 624-631.
M. Chen, "CMOS Hot Carrier Protection with LDD," Semiconductor Internatonal, Apr. 1988, pp. 1, 5, 6 and 78-81.
H. Mikoshiba, et al., "Comparison of Drain Structures in n-Channel MOSFET's, " IEEE Transactions on Electron Devices, vol. ED-33, No.1, Jan. 1986, pp. 140-144.
Bowers Jr. Charles L.
Gurley Lynne A.
National Semiconductor Corporation
LandOfFree
Method of making a high-voltage MOS transistor with increased br does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of making a high-voltage MOS transistor with increased br, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making a high-voltage MOS transistor with increased br will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1874970