Method of patterned eroding of a coating provided on a substrate

Details Method of patterned eroding of a coating provided on a substrate Method of patterned eroding of a coating provided on a substrate

1998-02-02

1999-06-08

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

445 24, 451 29, 451 30, H01J 900, B24B 100, G03F 700

Patent

active

059103965

ABSTRACT:
In a method in which a top coating (2) on a relatively hard substrate (1) is patterned by means of a stream of kinetic particles while being masked by a mask (3), the substrate (1) is coated with a damping layer (4) of a ductile material before the top coating (2) is provided.

REFERENCES:
patent: 5833516 (1998-11-01), De Haas et al.

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