Actuated mirror array and method for the fabricating thereof

Details Actuated mirror array and method for the fabricating thereof Actuated mirror array and method for the fabricating thereof

1994-07-21

1996-04-09

Engel, James

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156236, 216 36, B32B 3100

Patent

active

055058078

ABSTRACT:
The present invention relates to improved methods for fabricating and mounting an array of M.times.N mirrors on an array of M.times.N electrodisplacive actuators to thereby form an array of M.times.N electrodisplacive actuated mirrors for use in an optical projection system, wherein M and N are integers. In accordance with the present invention, there are provided two methods, one of the methods comprising the steps of: forming a separation layer on a substrate; providing a supporting layer on the separation layer; bonding the array of M.times.N actuators on the supporting layer; removing the separation layer so as to disengage the substrate; patterning the supporting layer into an array of M.times.N supporting members; and forming a light reflecting metallic layer on top of each of the supporting members to thereby provided the array of M.times.N electrodisplacive actuated mirrors. The other method comprises the steps of: forming a separation layer on a substrate; providing a reflection layer on top of the substrate; creating an array of M.times.N reflectors on the separation layer from the reflection layer formed thereon; providing a supporting layer; patterning the supporting layer into M.times.N disjointed supporting members; bonding the array of M.times.N actuators; and removing the separation layer to thereby provide the array of M.times.N electrodisplacive actuated mirrors.

REFERENCES:
patent: 4441791 (1984-04-01), Hornbeck
patent: 4826553 (1989-05-01), Armitage et al.

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