Polishing pad having a grooved pattern for use in a chemical mec

Details Polishing pad having a grooved pattern for use in a chemical mec Polishing pad having a grooved pattern for use in a chemical mec

1998-01-06

1999-11-16

Eley, Timothy V.

Abrading

Flexible-member tool, per se

Interrupted or composite work face

451529, 451550, B24D 1100

Patent

active

059847697

ABSTRACT:
A polishing pad for a chemical mechanical polishing apparatus. The polishing pad includes a plurality of concentric circular grooves. The polishing pad may include multiple regions with grooves of different widths and spacings.

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