Radiant energy – Inspection of solids or liquids by charged particles
Patent
1990-09-27
1992-01-21
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, H01J 3700
Patent
active
050830228
ABSTRACT:
A scanning tunneling microscope includes an observation optical system for optically observing the surface of an object. The optical system is fixed on an optical system fixing member. The optical system is moved in a direction (Z-direction) vertical to the surface of the object by means of a motor, whereby the focal point of the optical system is adjusted. An STM measurement probe supported by an optically transparent member is disposed between the optical system and the object. When the object is optically observed, the probe is displaced from the focal point by means of a micrometer. Thus, an optical observation image of the surface of the object, which is not affected by the shadow of the probe, can be obtained. When the STM measurement is carried out, a probe unit enables the probe to scan the surface of the object, and an STM image is obtained by a conventional method.
REFERENCES:
patent: 3019705 (1962-02-01), Wilkinson
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4676608 (1987-06-01), Faubion
patent: 4914293 (1990-04-01), Hayashi et al.
patent: 4992728 (1991-02-01), McCord et al.
patent: 4999495 (1991-03-01), Miyata et al.
IBM Technical Disclosure Bulletin, vol. 30, No. 5, Oct. 1987, pp. 369-370, Armonk, N.Y., Optically Transparent Tip for Tunneling Microscopy.
Journal of Vacuum Science & Technology: Part A, vol. 6, No. 2, Mar./Apr. 1988, pp. 383-385, New York, Design of a Scanning Tunneling Microscope for Biological Applications.
Mishima Shuzo
Miyamoto Hirofumi
Ohta Hiroko
Okada Takao
Takase Tsugiko
Anderson Bruce C.
Olympus Optical Co,. Ltd.
LandOfFree
Scanning tunneling microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning tunneling microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning tunneling microscope will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-117084