Method and apparatus for using a retaining ring to control the e

Details Method and apparatus for using a retaining ring to control the e Method and apparatus for using a retaining ring to control the e

1996-06-19

1998-08-18

Smith, James G.

Abrading

Machine

Rotary tool

451285, 451287, 451288, 451289, 451 41, B24B 500

Patent

active

057952159

ABSTRACT:
A process using a retaining ring assembly of a carrier head to precompress a polishing pad to reduce or minimize the edge effect in a chemical mechanical polishing process.

REFERENCES:
patent: 5584751 (1996-12-01), Kobayashi et al.

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