Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1998-07-21
2000-09-19
Elms, Richard
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438 50, 437 40, 437189, 257774, H01L 21336
Patent
active
061210943
ABSTRACT:
The present invention is directed to a new semiconductor device and a method for making same. The semiconductor device is comprised of a gate dielectric layer, a conductor layer, and a metal oxide layer positioned between the gate dielectric layer and the conductor layer. The method comprises forming a gate dielectric layer, a conductor layer, and a metal oxide layer between the gate dielectric layer and the conductor layer.
REFERENCES:
patent: 5188974 (1993-02-01), Mochizuki
patent: 5529953 (1996-06-01), Shoda
patent: 5689140 (1997-11-01), Shoda
Gardner Mark I.
Gilmer Mark C.
Advanced Micro Devices , Inc.
Elms Richard
Luu Pho
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