Method of making a semiconductor device with a multi-level gate

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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438 50, 437 40, 437189, 257774, H01L 21336

Patent

active

061210943

ABSTRACT:
The present invention is directed to a new semiconductor device and a method for making same. The semiconductor device is comprised of a gate dielectric layer, a conductor layer, and a metal oxide layer positioned between the gate dielectric layer and the conductor layer. The method comprises forming a gate dielectric layer, a conductor layer, and a metal oxide layer between the gate dielectric layer and the conductor layer.

REFERENCES:
patent: 5188974 (1993-02-01), Mochizuki
patent: 5529953 (1996-06-01), Shoda
patent: 5689140 (1997-11-01), Shoda

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