Method for growing a high-melting-point metal film

Details Method for growing a high-melting-point metal film Method for growing a high-melting-point metal film

1990-08-31

1993-01-19

Beck, Shrive

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

427 38, 4272551, 4272552, C23C 1400, C23C 1600

Patent

active

051804689

ABSTRACT:
There is disclosed a process for growing a high-melting-point metal film comprising the steps of forming a first ion-implanted layer in a given region of a silicon substrate, in which region a second ion-implanted layer is formed; contacting a high-melting-point metal fluoride gas with the surface of the second ion-implanted layer to adhere the high-melting-point metal thereto; growing the high-melting-point metal film of a given thickness by reacting the mixture of the high-melting-point metal fluoride and silane gas; and subjecting the silicon substrate to a heat treatment, characterized in that the above third and fourth steps are alternatively repeated.

REFERENCES:
patent: 4180596 (1979-12-01), Crowder
patent: 4565157 (1986-01-01), Brors
patent: 4595608 (1986-06-01), King
patent: 4741928 (1988-05-01), Wilson
patent: 4746549 (1988-05-01), Ito
patent: 4749597 (1988-06-01), Mendonea
patent: 4766006 (1988-08-01), Gaizi
patent: 4800105 (1989-01-01), Nakayama
patent: 4804560 (1989-02-01), Shioya
patent: 4847111 (1989-07-01), Chon
patent: 4849260 (1989-07-01), Kusumoto
patent: 4892843 (1990-01-01), Schmitz
patent: 4902533 (1990-02-01), White
patent: 4981723 (1991-01-01), Hirase

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