Method of manufacturing a multi-degree-of-freedom manipulator

Details Method of manufacturing a multi-degree-of-freedom manipulator Method of manufacturing a multi-degree-of-freedom manipulator

1995-08-23

1997-10-21

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566561, 15665911, 216 2, 216 18, H01L 2100

Patent

active

056792166

ABSTRACT:
A multi-degree-of-freedom manipulator includes a flexible tube having a plurality of flex portions provided therealong, a plurality of actuators made of shape memory alloy and respectively provided near the flex portions to correspond to the flex portions, for flexing the flex portions, two common energy transmission paths, extending along the flexible tube, for transmitting an energy to the actuators, and selective energy supply members, provided between the common energy transmission paths and the actuators in series, for controlling the energy supplied from the common energy transmission path to the actuators, thereby respectively independently driving the actuators to bend the flexible tube. The manipulator is made by forming electronic circuits in a plurality of regions on a semiconductor substrate, forming wiring regions to connect the electronic circuits with flexible wiring portions, and removing a region of the semiconductor substrate other than a region thereof on which the electronic circuits are formed, thereby forming an actuator controlled chip array, used in the manipulator.

REFERENCES:
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patent: 4884557 (1989-12-01), Takehana et al.
patent: 4930494 (1990-06-01), Takehana et al.
patent: 5060632 (1991-10-01), Hibino et al.
patent: 5116457 (1992-05-01), Jerman
patent: 5235964 (1993-08-01), Abenaim
patent: 5289043 (1994-02-01), Marshall et al.
patent: 5372124 (1994-12-01), Takayama et al.

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