Process for imaging of photoresist including treatment of the ph

Details Process for imaging of photoresist including treatment of the ph Process for imaging of photoresist including treatment of the ph

1991-07-25

1993-10-05

McCamish, Marion E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430270, 430330, 430313, 156643, G03C 516, G03C 172

Patent

active

052503950

ABSTRACT:
The present invention relates to a process for negative tone imaging of photoresist to improve resolution of lithographic patterns.

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