ZPROM manufacture and design and methods for forming thin struct

Details ZPROM manufacture and design and methods for forming thin struct ZPROM manufacture and design and methods for forming thin struct

1996-05-06

1998-12-22

Tsai, Jey

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438130, 438983, H01L 218246

Patent

active

058518827

ABSTRACT:
A cost-competitive, dense, CMOS compatible ZPROM memory array design and method of manufacture is disclosed. The method of manufacture includes a novel method for forming extremely thin diodes and thin strips of other materials such as conductors by using oxide spacers as an etching mask.

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patent: 5130777 (1992-07-01), Galbraith et al.
patent: 5296716 (1994-03-01), Ovshinsky et al.
patent: 5379250 (1995-01-01), Harshfield

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