Yield evaluating apparatus and method thereof

Details Yield evaluating apparatus and method thereof Yield evaluating apparatus and method thereof

2008-11-03

2011-11-01

Whitmore, Stacy (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Design of semiconductor mask or reticle

Yield

C716S136000, C716S112000

Reexamination Certificate

active

08051394

ABSTRACT:
A yield evaluating apparatus and a method thereof are provided. The yield evaluating apparatus includes a spatial correlation module. The spatial correlation module receives at least one process-related data and a plurality of circuit layouts and obtains a correlation coefficient between unit elements in the circuit layouts according to the process-related data. The spatial correlation module calculates a spatial correlation between elements in each of the circuit layouts according to the correlation coefficient and selects one of the circuit layouts according to the spatial correlations.

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