Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1995-09-19
1996-10-29
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
378 84, H01K 4908
Patent
active
055699197
ABSTRACT:
An X-ray analytical apparatus of a wavelength dispersion type having a construction of essential parts improved using a microprobe of ion beam. An ion beam 10 is controlled to be deflected to scan in a fine region of a sample 3, a characteristic X-ray generated by irradiation of the ion beam is subjected spectro-process by a analyzing element 5 set to a predetermined radius of curvature by a curvature changing mechanism, and an X-ray having a specific wavelength selected by the spectro-process is detected by a proportional counter 7. When an angle of the analyzing element is set by a rotational stage to an incident angle of a specific X-ray determined by a detection element on the sample 3, a wide range of wavelength can be subjected to spectro-measured while the sample 3, the analyzing element 5 and the proportional counter 7 remain fixed in position. Since the proportional counter 7 is provided with a lengthy sensing portion, even if an incident position of the X-ray is changed, measurement can be made while a position of a detector remains fixed. Being a position sensitive type detector, incident position information of the X-ray different according to the wavelength can be removed, and the wavelength and strength of the X-ray can be measured while discriminating each X-ray quantum.
REFERENCES:
patent: 3914605 (1975-10-01), Hara
patent: 4680467 (1987-07-01), Bryson, III et al.
Furukawa Yukito
Inoue Ken-ichi
Suzuki Norio
Yokoyama Kazushi
Berman Jack I.
Kabushiki Kaisha Kobe Seiko Sho
Nguyen Kiet T.
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