Writing apparatus, writing data conversion method, and...

Computer-aided design and analysis of circuits and semiconductor – Design of semiconductor mask or reticle – Layout generation

Reexamination Certificate

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C341S063000, C341S067000, C382S246000

Reexamination Certificate

active

07926007

ABSTRACT:
A writing apparatus includes a unit storing writing data, a unit which acquires pattern information on patterns defined in the data, a unit which generates a table where each pattern information corresponds to a number of times each pattern information is used, for each predetermined region, a unit which generates a Huffman tree, based on the table, a unit which generates another table where each pattern information corresponds to a variable length binary code generated by encoding each pattern information such that the larger the number of times each pattern information is used, the smaller a value of the code, based on the tree, a unit which produces converted data, which is defined by the data, in the region into a predetermined format using the code, based on the other table, and a unit which writes the patterns defined, onto a workpiece, based on the converted data in the region.

REFERENCES:
patent: 4121259 (1978-10-01), Preuss et al.
patent: 5675332 (1997-10-01), Limberg
patent: 6865668 (2005-03-01), Benes et al.
patent: 7365658 (2008-04-01), Todorov et al.
patent: 2007-128933 (2007-05-01), None
Office Action issued Dec. 20, 2010 in corresponding Korean Patent Application No. 10-2009-8343 (with English translation).

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