Windows configurable to be coupled to a process tool or to...

Details Windows configurable to be coupled to a process tool or to... Windows configurable to be coupled to a process tool or to...

2005-03-15

2005-03-15

Thomas, David B. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S006000, C451S041000

Reexamination Certificate

active

06866559

ABSTRACT:
Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad are provided. One window includes a first portion and a second portion. The first portion includes a first material, and the second portion includes a second material different than the first. Another window includes a substantially transparent gel. In some instances, the gel includes a triblock copolymer and a plasticizing oil. An additional window includes an upper window, a housing, and a diaphragm. The housing may allow a fluid to flow into and out of a space between the housing and the diaphragm. In another embodiment, a window includes a layer of material coupled to lateral surfaces of the window. In some cases, the window may be disposed within an opening in a polishing pad, and movement of the window within the polishing pad may compress the layer of material.

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