Wien-type imaging corrector for an electron microscope

Details Wien-type imaging corrector for an electron microscope Wien-type imaging corrector for an electron microscope

1989-12-11

1990-10-09

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, 250396R, 250396ML, G21K 108

Patent

active

049623133

ABSTRACT:
The invention relates to an imaging corrector of the Wien type which is especially suitable for use in an electron microscope. The corrector includes an arrangement of at least eight electrodes and at least eight magnetic poles and is mounted between two electron lenses. The corrector simultaneously corrects the chromatic and spherical aberrations especially of electron lenses of low-voltage electron microscopes. The corrector begins and ends at intermediate image planes and has an intermediate image plane in its center. The intermediate image plane at the center coacts with two symmetry planes located between the intermediate image planes for the desired imaging characteristics. All chromatic and spherical aberrations for electrons of any desired energy can be corrected with two of the correctors coacting with a thick telescopic round lens disposed therebetween.

REFERENCES:
patent: 2919381 (1959-12-01), Glaser

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