Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
Inventor
active
Alpha-type electron energy filter
Arrangement for detecting secondary and/or backscatter electrons
Correction system for a charged-particle beam apparatus
Corrective for eliminating the third-order aperture...
Corrector for axial and off-axial beam paths
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Profile ID: LFUS-PAI-P-266559