Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2006-05-16
2006-05-16
Lee, John R. (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S492210, C250S492300, C250S281000
Reexamination Certificate
active
07045799
ABSTRACT:
A method and apparatus for weakening a strong focus effect of an acceleration-deceleration column of an ion implanter during a deceleration mode are disclosed. The apparatus includes a tube lens surrounding the ion beam adjacent to a deceleration lens of the acceleration-deceleration column. The tube lens causes a defocusing of the ion beam at the entrance of the tube lens, which reduces the ion dispersion problem generated by the column. The invention also includes an accel-decel column and ion implanter incorporating the tube lens. An additional deceleration-suppression electrode may also be added subsequent to the tube lens for confining electrons within the tube lens.
REFERENCES:
patent: 4766320 (1988-08-01), Naitoh et al.
Anderson Donald
Chang Shengwu
McGillicuddy Daniel
Olson Joseph C.
Lee John R.
Leybourne James J.
Varian Semiconductor Equipment Associates Inc.
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