Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
Inventor
active
Electron confinement inside magnet of ion implanter
High voltage insulator for preventing instability in an ion...
Indirectly heated cathode ion source
Ion beam implant current, spot width and position tuning
Method, system, and apparatus for improving doping...
No associations
LandOfFree
Shengwu Chang does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Shengwu Chang, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Shengwu Chang will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-2348469