Waveform generator, semiconductor testing device and...

Error detection/correction and fault detection/recovery – Pulse or data error handling – Digital logic testing

Reexamination Certificate

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C714S815000

Reexamination Certificate

active

06654916

ABSTRACT:

This patent application claims priority based on a Japanese patent applications, H10-258219 filed on Sep. 11, 1998 and H11-218235 filed on Jul. 30, 1999, the contents of which are incorporated herein by reference.
DETAILED DESCRIPTION OF THE INVENTION
The present invention relates to a waveform generator capable of generating an arbitrary waveform, and more specifically to a waveform generator capable of generating an arbitrary waveform having a short time resolution.
In order to test a device such as an LSI, an arbitrary waveform generator capable of generating arbitrary waveforms is necessary.
FIGS. 1 and 2
show examples of conventional arbitrary waveform generators.
FIG. 1
is a block diagram of a conventional arbitrary generator
200
.
FIG. 2
is a circuit diagram of a waveform generation circuit from a conventional arbitrary waveform generator.
The arbitrary waveform generator
200
is comprised of a digital signal processor (DSP)
202
having a memory, a waveform memory
204
for storing data for generating output waveforms, a full-scale digital to analog converter (full-scale DAC)
205
, an off-set digital to analog converter (off-set DAC)
206
, a waveform generation digital to analog converter (waveform generation DAC)
208
for generating an arbitrary waveform, a low-pass filter (LPF)
210
, an amplifier
212
and a clock control unit
214
. The waveform memory
204
, the full-scale DAC
205
and the off-set DAC
206
are connected to the DSP
202
respectively. The waveform generation DAC
208
is connected to the waveform memory
204
. The LPF
210
is connected to the waveform generation DAC
208
and the amplifier
212
is couple to the LPF
210
.
The full-scale DAC
205
serves to determine the output voltage value on the basis of a digital value stored in the waveform memory
204
. The output signal from the full-scale DAC
205
is output to the waveform generation DAC
208
.
The off-set DAC
206
serves to adjust the output voltage value to zero when the signal value stored in the waveform memory
204
is a “0” code. The output signal from the off-set DAC
206
is output to the amplifier
212
. The clock control unit
214
serves to synchronize the waveform generator
200
.
Referring to
FIG. 2
, the waveform generation DAC
208
comprises 5 current sources
221
,
222
, . . . to
225
, with each capable of outputting predetermined current values. The current switches
231
,
232
, . . . to
235
are held in communication with each other through an output line. Each of the current sources
221
,
222
, . . . to
225
is cascaded to each of the respective current switches
231
,
232
, . . . to
235
. One end of the output line is connected to the ground through a resistance
241
and the other end of the output line is connected to an output terminal.
Each of the respective current sources has an ability to output a current half of the previous current sources value. For example, the current source
221
is capable of outputting current with a value of I, while current source
222
is capable of outputting current of value I/2. It follows that current sources
223
,
224
and
225
are capable of outputting current with values of I/4, I/8 and I/16 respectively. This means that the current switch
231
is the most significant bit (MSB) and the current switch
235
is the least significant bit (LSB). The current switches
231
,
232
, . . . to
235
are switched on and off by the input data from the waveform memory
204
. For example, when the input data from the waveform memory
204
is “00101”, the currect switches
233
and
235
are switched on to output current having a current value of (I/4+I/16). The current is output to the output terminal via the resistance
241
to give an output signal (I/4+I/16)×R. The full-scale DAC
205
determines the actual values of the current value I.
The waveform generator
200
can generate an arbitrary waveform by switching on and off the current switches in accordance with the input data from the waveform memory
204
.
The time resolution of the waveform generated by the conventional waveform generator described above is determined by the operational speed of the current switches
231
,
232
, . . . to
235
. The current switches
231
,
232
, . . . to
235
are operated at 1 GHz frequency. This means that the conventional waveform generator can generate a waveform having a time resolution as short as 1 nsec.
The conventional waveform generator therefore cannot generate a waveform having a shorter time resolution than 1 nsec although there are applications where this may be required. For example, it is necessary to use an arbitrary waveform having a time resolution as short as 8 GHz sampling/sec to test an AC characteristic of a device for high speed interface such as a 1 GHz Ethernet (registered trademark). The conventional waveform generator is therefore unsuitable for this application as it cannot generate an arbitrary waveform with a time resolution of more than 1 GHz due to the speed limitation of the current switches
231
,
232
, . . . to
235
.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide a waveform generator capable of generating an arbitrary waveform with an adequately short time resolution to solve problems similar to that described above. It is another object of the present invention to provide a semiconductor testing device and a semiconductor device both including the waveform generator.
The waveform generator comprises an input terminal to which an input signal is input; a delay unit having a plurality of delay means for delaying propagation of the input signal to output a delayed input signal, the delay means being cascaded with each other; a processing unit having a plurality of processing means, each of the processing means outputting an output signal based on each of the delayed input signal input thereto; and a composing unit for composing the output signals from each of the processing means of the processing unit to generate a waveform.
The waveform generator may also comprise a plurality of the delay units connected to the input terminal in parallel relationship with each other; and a plurality of the processing units correspondingly provided to each of the plurality of delay units. The composing unit adds the output signals from each of the processing means to give a sum total value and generates the waveform on the basis of this total value. The processing unit comprises processing means into which the input signal is fed to the input terminal.
The waveform generator may further comprise a plurality of memory for storing data for generating the waveform, each of which is connected to each of the respective plurality of processing means. Each of the processing means outputs the output signal on the basis of the data for generating the waveform stored in each of the memory.
The processing means may either directly output the delayed input signal or outputs after reversing the delayed input signal as the output signal on the basis of the data for generating the waveform. The memory of the waveform generator may store a plurality of data for generating the waveform, and the processing means outputs the output signal on the basis of the plurality of data stored in the memory. The result is the waveform generated comprises a longer period wave than the input signal.
The waveform generator may also contain a data control unit for controlling the plurality of data for generating the waveform to be output at a predetermined interval and the processing means outputting the output signal on the basis of the data for generating the waveform output by the data control unit. The delay unit may include first and last delay means each having an input and an output, the input of the first delay means being connected to the input terminal, and the output of the last delay means being connected to the input of the first delay means. The processing means may output the output signal on the basis of the input signal and the data for generating the waveform stored in th

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