Wash composition with polymeric surfactant

Details Wash composition with polymeric surfactant Wash composition with polymeric surfactant

2007-05-08

2007-05-08

Chu, John S. (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

C430S326000, C430S331000, C516S067000, C516S074000, C516S075000, C516S203000, C516S204000

Reexamination Certificate

active

10881780

ABSTRACT:
A wash composition that includes a polymeric surfactant and methods for using the wash composition are described herein.

REFERENCES:
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patent: 6472136 (2002-10-01), Tan et al.
patent: 2005/0221236 (2005-10-01), Akiyama et al.
patent: 1396527 (2004-03-01), None
patent: 56142528 (1981-11-01), None
patent: 02051592 (1990-02-01), None
Christopher L. Soles et al., Polymer dynamics and diffusive properties in ultra-thin photoresist films, Proceedings of SPIE—The International Society of Optical Engineering, 11 pages, Feb. 2003, Santa Clara, CA.

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