Wafer scanning device

Details Wafer scanning device Wafer scanning device

2007-05-15

2007-05-15

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S492300, C250S492210, C250S398000

Reexamination Certificate

active

11093326

ABSTRACT:
The wafer scanning device causes a wafer to scan in a vacuum area and includes a holder10to hold a wafer, a ball screw20to move the holder10to scan, a motor50to drive the ball screw20and an integrally formed support frame60. While the holder10and the ball screw20are installed in the vacuum area, a transmission mechanism offset from the line of travel of the ball screw20and the motor50are installed in the atmosphere. Thus the wafer scanning device improves responsiveness with respect to the scanning speed control, enhances the uniformity of the scanning speed, has the motor or the like arranged properly and achieves the tilt of a wafer in a most preferable manner.

REFERENCES:
patent: 6163033 (2000-12-01), Smick et al.
patent: 6559461 (2003-05-01), Seo
patent: 2005/0230643 (2005-10-01), Vanderpot et al.
patent: 10-326590 (1998-12-01), None

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