Wafer sample retainer for an electron microscope

Details Wafer sample retainer for an electron microscope Wafer sample retainer for an electron microscope

1997-12-01

1999-07-13

Westin, Edward P.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

25044211, 2504922, G21K 508

Patent

active

059230401

ABSTRACT:
A wafer sample retainer for an electron microscope includes a clamp arranged to engage one or more wafer samples against a post. The clamp may be spring biased and may be operable by depressing a portion of a spring biased member to pivot the spring biased member away from a support post to create an opening to receive the samples. The sample holder may be removably mounted on a base which may be positioned using a conventional electron microscope positioner.

REFERENCES:
patent: 3476936 (1969-11-01), Mills
patent: 4700936 (1987-10-01), Lunn
patent: 4718651 (1988-01-01), Brycki
patent: 4877228 (1989-10-01), Ripert

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