Wafer polishing device

Details Wafer polishing device Wafer polishing device

1996-02-23

1998-04-07

Rose, Robert A.

Abrading

Machine

Rotary reciprocating tool

451168, 451 53, 451307, 451388, 451287, 451288, 451392, 451 41, B24B 500

Patent

active

057357315

ABSTRACT:
An improved chemical mechanical polishing (CMP) device for chemically and mechanically planarizing the surface of a semiconductor wafer includes a flat wafer stage for loading and affixation of the semiconductor wafer so that the surface of a material to be polished, i.e. the surface of the wafer, faces up, and a cylindrical polishing pad formed above the exposed surface of the wafer to be polished which is rotatable at high speed so that the contact point of the wafer and the pad moves linearly. The stage is constructed to support a wafer by a vacuum suction through vacuum holes. The cylindrical polishing pad has a rotating axis for transmitting rotation at the center, thereof, and a double layer polishing pad having different hardness on a peripheral surface of the rotating axis.

REFERENCES:
patent: 4513538 (1985-04-01), Wolters et al.
patent: 4597228 (1986-07-01), Koyama et al.
patent: 4640651 (1987-02-01), Runyon
patent: 4930259 (1990-06-01), Kobylenski et al.
patent: 5127196 (1992-07-01), Morimoto et al.
patent: 5476413 (1995-12-01), Hasegawa et al.
patent: 5527209 (1996-06-01), Volodarsky et al.

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